A growing demand for cleanliness

In many industries, there is an increasing need for ultra clean systems for further advancements in technology. Such industries include partners operating in the semiconductor, (aero)space, automotive and medical industry, where industry standards are becoming increasingly challenging to keep up with. Examples of systems that need to fulfill such standards include electron-beam systems (e.g. SEM/TEM) and wafer processing tools (e.g. metrology, exposure tools, deposition/etching tools). A vital tool to obtain ultra clean systems relies on plasma cleaning of the critical surfaces.

Way of working

Plasma cleaning is the process of removing contaminants from high tech parts or modules to obtain molecular cleanliness grades. Instead of using wet chemicals, we use a low or high pressure environment in which an activated gas binds with the contaminants to ensure their removal. Depending on your product's properties, the process is tailored to meet the specific needs of the end product in terms of cleanliness. In case the product to be treated is a standard material often treated with plasma, plasma cleaning-as-a-service provides a solution to outsource your cleaning needs. However, in case the interaction of your material of choice with plasma cleaning is less common, you can outsource the development of the cleaning process to us and collaborate on defining the best strategy to reach the desired outcome.

Facilities

Our plasma processes are embedded in a cleanroom environment to meet particle cleanliness grade ISO6. For plasma processes, we possess capabilities in plasma treatment using argon, helium, oxygen, hydrogen, nitrogen, and a combination thereof both simultaneously or in a sequential process. Moreover, we facilitate storage and transport under a conditioned atmosphere to maintain the cleanliness grade up to the point of assembly or integration. For specific projects, we also extend our capabilities based on customer needs, for example, using different gases for processing or storage.